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Connection flange | DN 40 CF-R |
---|---|
Actuator |
|
Resolution | 5 µm |
Bakeout temperature: feedthrough max. | 300 °C |
Bakeout temperature: micrometer screw/piston max. | 100 °C |
Load capacity radial: at max. stroke | 100 N |
Load capacity: torsion | 0.5 nm |
Mode of operation | Micrometer screw |
Operating temperature | ≤ 50 °C |
Tightness | 1 · 10-11 Pa m³/s |
Pressure range | 1E-9 hPa – 5E2 hPa over pressure |
Feedthrough |
|
Mounting orientation | Arbitrary |
Precision | 5 µm |
Weight | 1 kg |
Stroke | 50 mm |
Stroke per revolution | 1 mm |
Materials in contact with media |
|
Service life | 10000 cycles |
Shaft connection | M6 x 10 mm / ø 10 mm |
Shaft load, axial: against atmosphere | 500 N |
Shaft load, axial: against vacuum | 440 N |